The term nanolithography is derived from the Greek words “nanos”, meaning Dwarf; “lithos”, meaning rock; and “grapho” meaning to write. Therefore the literal translation is "tiny writing on rocks".

With a clever combination of photolithography, etching and electroplating, it is possible to ‘draw’ sub-100-nm lines of noble metals over large areas The alternative text for this image may have been ...

Photolithography is one of the most important and easiest methods of microfabrication, and is used to create detailed patterns in a material. In this method, a shape or pattern can be etched through ...

One of the things that has kept Moore’s Law rolling along is our ability to fashion chips with ever-smaller features. The masks that produce the features of a chip are made by a process called ...

SAN JOSE — KLA-Tencor Corp. today announced the addition of an etch modeling and analysis module to its Prolith lithography simulation and modeling software to help users accelerate advanced ...